Compensation Control of Cutting Tool Position in Machining Non-Axisymmetric Optic Mirror Surface
Piezoelectric servo mechanism, with its existing nonlinear response and hysteresis, restricts the precision greatly when applied to manufacturing of non-axisymmetric optic mirror. On the basis of theory analysis and experiments, this paper builds three kinds of feed-forward model of piezoelectric servo cutting system. According to these mathematical models, we make the compensation control to the cutting tool position, which results the maximum displacement error less than 0.04μm. And based on this method, experiments on machining non-axisymmetric optic surface of wave front corrector shows the Zernike relative error is less than 10%. So the compensation control of feed-forward control model of cutting tools position can efficiently counteract the influence of nonlinear response and hysteresis, which improves machining precision of non-axisymmetric optic mirror surface.
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
Y. L. Zhang et al., "Compensation Control of Cutting Tool Position in Machining Non-Axisymmetric Optic Mirror Surface", Materials Science Forum, Vols. 505-507, pp. 181-186, 2006