Growth Structures and Phase Formation in Industrially Room-Temperature Pulsed Laser Deposited FCC Ti-Based Nitride Coatings

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The current work focuses on the materials science aspects of the growth phenomena of titanium-based coatings TiN, (Ti,Al)N and (Ti,Al)(C,N) with face-centered cubic lattice structure, deposited by the industrially-styled Pulsed Laser Deposition (PLD) technique at room temperature. hese coating materials are widely spread in mechanical, tribological and decorative applications due to their exceptional physical and chemical properties. Recently, the trend of using temperaturesensitive materials like polymers and tool steels of the highest hardness demands new lowtemperature coating techniques for protective surface finishing as well as for functionalization of the surfaces. These titanium-based compounds can fulfill a wide range of these demands, but up to now there is a lack of industrially designed vacuum coating techniques operating at temperatures lower than 50 °C necessary for these materials. The PLD process is known as one of the most promising candidates for such coating demands. But up to now PLD is only a well-established laboratory coating technology and has not become a standard industrial coating technique despite its outstanding process features. The missing of PLD coating systems, which fulfill the requirements for industrial applications like high-rate deposition and adequate sizes of deposition chambers, is considered as one of the main obstacles for a breakthrough of the PLD technique. To overcome this problem an industrially designed PLD coating system has been developed and built at the Laser Center Leoben of JOANNEUM Research Forschungsgesellschaft mbH.

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Edited by:

B.G. Wendler, P. Kula and J. Jedlinski

Pages:

85-104

DOI:

10.4028/www.scientific.net/MSF.513.85

Citation:

J. Lackner "Growth Structures and Phase Formation in Industrially Room-Temperature Pulsed Laser Deposited FCC Ti-Based Nitride Coatings ", Materials Science Forum, Vol. 513, pp. 85-104, 2006

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May 2006

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[1] R.F. Bunshah: Handbook of Hard Coatings (Noyes Publ., Park Ridge, N.J., 2000).

[2] J.P. Bars, E. Etchessahar, J. Debuigne: J. Less-Common Metals Vol. 52 (1997) p.51.

[3] D.B. Chrisey, G.K. Hubler (Eds. ): Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).

[4] J.M. Lackner: Innovative Coating by Pulsed Laser Deposition (PhD thesis, University of Leoben, Austria, 2003).

[5] J.M. Lackner, W. Waldhauser, R. Ebner, B. Major, T. Schöberl: Thin Solid Films Vol. 181C (2004) p.585.

[6] J.M. Lackner, W. Waldhauser, R. Ebner, C. Stotter, G. Jakopic, T. Schöberl: BHM 149 (2004) p.118.

[7] L.E. Toth: Refractory Materials (vol. 7, Academic Press, New York, 1971).

[8] F.J. Teeter: in Ceramic Coatings (vol. 44, ASME, New York, 1993, p.87).

[9] K. Holmberg, A. Matthews: Coatings Tribology (Elsevier, Amsterdam, 1994).

[10] E. Ertuerk, O. Knotek,W. Bergmer, H. -G. Prengel: Surf. Coat. Technol. Vol. 46 (1991) p.39.

[11] E. Bergmann, H. Kaufmann, R. Schmid, J. Vogel: Surf. Coat. Technol. Vol. 42 (1990) p.237.

[12] S. PalDey, S.C. Deevi: Mater. Sci. Eng. A Vol. 342 (2003) p.58.

[13] B. Navinsek: Mater. Manuf. Process. Vol. 7 (1992) p.63.

[14] W.D. Sproul: J. Vac. Sci. Technol. A Vol. 12 (1994) p.1595.

[15] K. Narasimhan, S. Prasad, D. Bhat: Wear Vol. 188 (1995) p.123.

[16] J. Deng, M. Braun: Surf. Coat. Technol. Vol. 70 (1994) p.49.

[17] H.K. Tonshoff, C. Blawit: Surf. Coat. Technol. Vol. 93 (1997) p.119.

[18] T. Lyman, H.E. Boyer, W.J. Carnes, M.W. Chevalier: Metals Handbook, Vol. 8, Metallography, Structures and Phase Diagrams (ASM International, Materials Park, Ohio, 1973).

[19] J.C. Schuster, J. Baure: J. Solid State Chem. Vol. 53 (1984) p.260.

[20] J.M. Lackner, W. Waldhauser, R. Ebner, W. Lenz, W. Mroz: Galvanotechnik Vol. 5 (2003) p.1226.

[21] J.M. Lackner: Large-area high-rate Pulsed Laser Deposition - Principles, Applications and Potentialities in Industrial Coating, Surf. Coat. Technol. (2005) (in preparation).

[22] R. Ebner, W. Waldhauser, W. Lenz: Pulsed Laser Deposition: A new Technique for Coating Sheet Materials and three-dimensional industrial Components (Proc. Materials Week 2001, Munich).

[23] J.M. Lackner: (in preparation).

[24] J.A. Thornton: Ann. Rev. Mater. Sci. Vol. 7 (1977) p.239.

[25] B.A. Movchan, A.V. Demchisin: Phys. Metals Metallogr. Vol. 28 (1969) p.83.

[26] J.A. Thornton: J. Vac. Sci. Technol. Vol. 11 (1974) p.666.

[27] R. Messier, A.P. Giri, R.A. Roy: J. Vac. Sci. Technol. A Vol. 2 (1984) p.500.

[28] J.A. Thornton: J. Vac. Sci. Technol. Vol. 12 (1975) p.830.

[29] W. Ensinger: Nucl. Instr. Meth. Phys. Res. B Vol. 127/128 (1997) p.796.

[30] P. Haasen: Physical Metallurgy (Cambridge University Press, London, UK, 1978).

[31] C.S. Barrett, T.B. Massalski: Structure of Metals (Pergamon Press, Oxford, 1980).

[32] J.E. Greene: in D.T.J. Hurle (Ed. ), Handbook of Crystal Growth, Vol. 1 (Elsevier Science Publishers, Amsterdam, 1993, p.640).

[33] W. Schatt, H. Worch (Eds. ), Werkstoffwissenschaft (Deutscher Verlag für Grundstoffindustrie, Stuttgart, 1996).

[34] F.A. Smidt, Int. Mat. Reviews Vol. 35 (1990) p.61.

[35] R. Roy, Surf. Coat. Technol. Vol. 51 (1992) p.203.

[36] D.M. Mattox: J. Vac. Sci. Technol. A Vol. 7 (1989) p.1105.

[37] S.M. Metev, V.P. Veiko (Eds. ): Laser-assisted microtechnology (2nd Edition; Springer; Berlin, 1998, p.228).

[38] A.D. Akhsakhalyan, B.A. Biryutin, S.V. Gaponov, A.A. Gudkov, V.I. Luchin: Sov. Phys. - Techn. Phys. Vol. 27 (1982) p.969.

[39] A.D. Akhsakhalyan, B.A. Biryutin, S.V. Gaponov, A.A. Gudkov, V.I. Luchin: Sov. Phys. - Techn. Phys. Vol. 27 (1982) p.973.

[40] J.M. Lackner, W. Waldhauser, R. Ebner, W. Lenz, B. Major, T. Schöberl: Praktische Metallographie Sonderband Vol. 34 (2003) p.291.

[41] J.M. Lackner, W. Waldhauser, R. Ebner, J. Keckés, T. Schöberl: Surf. Coat. Techn. 177- 178 (2004) p.447.

[42] B. Major, W. Mroz, T. Wierzchon, W. Waldhauser, J.M. Lackner, R. Ebner: Surf. Coat. Techn. Vol. 180-181 (2004) p.580.

[43] T. Müller: Charakterisierung von TiNx, TiOx und Ti PLD-Schichten (Diploma Thesis, University of Leoben, Leoben, 1997).

[44] K.T. -Y. Kung, R. Reif: J. Appl. Phys. Vol. 59 (1986) p.2422.

[45] P. Huber, D. Manova, S. Mandl, B. Rauschenbach: Surf. Coat. Technol. Vol. 156 (2002) p.176.

[46] C. Kooy, J.M. Nieuwenhuizen, in: R. Niedermayer, H. Mayer: Basic Problems in Thin Film Physics (Vandenhoeck and Ruprecht, Göttingen, 1966, p.181).

[47] J.F. Ziegler, J.P. Biersack: SRIM - The Stopping and Range of Ions in Matter (SoftwareVersion 2003. 20, 2003).

[48] A. Van der Drift: Philips Res. Rep. Vol. 22 (1967) p.267.

[49] L. Hultman, W. -D. Münz, J. Musil, K. Kadlec, I. Petrov, J.E. Greene: J. Vac. Sci. Technol. A Vol. 9 (1991) p.434.

[49] N. Sonnenberg, A.S. Longo, J.M. Cim, P.B. Chang, K.G. Ressler, P.C. McIntyre, Y.P. Liu: J. Appl. Phys. Vol. 74 (1993) p.1027.

[50] G. Knuyt, C. Quaeyhaegens, J. D'Haen, L.M. Stals: Thin Solid Films Vol. 258 (1995) p.159.

[51] G. Knuyt, C. Quaeyhaegens, J. D'Haen, L.M. Stals: Surf. Coat. Technol. Vol. 76-77 (1995) p.311.

[52] H. Ljungcrantz, L. Hultman, J. -E. Sundgren, L. Karlsson: J. Appl. Phys. Vol. 78 (1995) p.832.

[53] J. -H. Huang, Y. -P. Tsai, G. -P. Yu: Thin Solid Films Vol. 355-356 (1999) p.440.

[54] Y.M. Chen, G.P. Yu, J. -H. Huang: Surf. Coat. Techn. Vol. 141 (2001) p.156.

[55] M.I. Jones, I.R. McColl, D.M. Grant: Surf. Coat. Technol. Vol. 132 (2000) p.143.

[56] H. Lüth: Surfaces and Interfaces of Solid Materials (Springer Vg., Berlin, 1995).

[57] I. Petrov, L. Hultman, U. Helmersson, J. -E. Sundgren, J.E. Greene: Thin Solid Films Vol. 169 (1989) p.299.

DOI: 10.1016/0040-6090(89)90713-x

[58] J. Pelleg, L.Z. Zevin, S. Lungo: Thin Solid Films Vol. 197 (1991) p.117.

[59] U.C. Oh, J.H. Je: J. Appl. Phys. Vol. 74 (1993) p.1692.

[60] H. Kheyrandish, J.S. Colligon, J. -K. Kim: J. Vac. Sci. Techn. A Vol. 12 (1995) p.2723.

[61] Powder Diffraction File from JCPDF International Center for Diffraction Data; Swarthmore; (1992).

[62] B. Rother, J. Vetter: Plasmabeschichtungsverfahren und Hartstoffschichten (Deutsche Vg. für Grundstoffindustrie, 1992).

[63] G. Gottstein: Physical Foundation of Materials Science (Springer Vg., 2004).

[64] R.W. Siegel: Mater. Sci. Forum Vol. 235-238 (1997) p.851.

[65] V. Sedlacek: Metallic Surfaces, Films and Coatings (Elsevier, Amsterdam, 1992).

[66] D.S. Rickerby, B.A. Bellamy, A.M. Jones: Surf. Engin. Vol. 3 (1987) p.138.

[67] D.S. Rickerby, G. Eckold, K.T. Scott, I.M. Buckley-Golder: Thin Solid Films Vol. 154 (1987) p.125.

[68] D.S. Rickerby: A.M. Jones, B.A. Bellamy: Surf. Coat. Technol. Vol. 37 (1989) p.111.

[69] H. Windischmann: J. Appl. Phys. 62 (1987) p.1800.

[70] H. Holleck: J. Vac. Sci. Technol. A 4 (1986) p.2661.

[71] A. Kimura, h. Hasegawa, K. Yamada, T. Suzuki: J. Mater. Sci. Lett. Vol. 19 (2000) p.601.

[72] T. Ikeda, H. Satoh: Thin Solid Films 195 (1991) p.99.

[73] M. Zhou, Y. makino, M. Nose, K. Nogi: Thin Solid Films Vol. 339 (1999) p.203.

[74] J.M. Lackner, W. Waldhauser, R. Ebner, R.J. Bakker, T. Schöberl, B. Major: Thin Solid Films Vol. 468 (2004) p.125.

[75] P. Panjan, M. Cekada, D. Kek Merl, M. Macek: Vacuum Vol. 71 (2003) p.261.

[76] C. Suryanarayana: Non-equilibrium Processing of Materials (Pergamon, 1999, p.313).

[77] J.M. Lackner, W. Waldhauser, R. Ebner, R.J. Bakker: Applied Physics A Vol. 79 (2004) p.1469.

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