Multifunctional Thin Film Zinc Oxide Semiconductors: Application to Electronic Devices


Article Preview

In this paper we report some of the recent advances in transparent thin film oxide semiconductors, specifically zinc oxide (ZnO), produced by rf magnetron sputtering at room temperature with multifunctional properties. By controlling the deposition parameters it is possible to produce undoped material with electronic semiconductor properties or by doping it to get either n-type or p-type semiconductor behavior. In this work we refer our experience in producing n-type doping ZnO as transparent electrode to be used in optoelectronic applications such as solar cells and position sensitive detectors while the undoped ZnO can be used as UV photodetector or ozone gas sensor or even as active layer of fully transparent thin film transistors.



Materials Science Forum (Volumes 514-516)

Edited by:

Paula Maria Vilarinho




E. Fortunato et al., "Multifunctional Thin Film Zinc Oxide Semiconductors: Application to Electronic Devices", Materials Science Forum, Vols. 514-516, pp. 3-7, 2006

Online since:

May 2006




[1] H.L. Hartnagel, A.L. Dawar, A.K. Jain, C. Jagadish, Semiconducting Transparent Thin Films, Institute of Physics Publ., Bristol (1995).

[2] E. Fortunato, V. Assunção, A. Gonçalves, A. Marques, H. Águas, L. Pereira, I. Ferreira, R. Martins, Thin Solid Films, 451-452, 443 (2004).

DOI: 10.1016/j.tsf.2003.10.139

[3] E. Fortunato, A. Gonçalves, A. Marques, A. Viana, H. Águas, L. Pereira, I. Ferreira, P. Vilarinho, R. Martins, Surface and Coatings Technology, 180-181, 20 (2004).

DOI: 10.1016/j.surfcoat.2003.10.025

[4] Z.K. Tang et al., Solid State Commun. 103, 459 (1997).

[5] F. Hamdani, A. Botchkarev, W. Kim, H. Moorkoc, M. Yeadon, J.M. Gibson, S.C.Y. Tsen, D.J. Smith, D.C. Reynolds, D.C. Look, K. Evans, C.W. Mitchel, P. Hemenger, Appl. Phys. Lett., 70, 467 (1997).

DOI: 10.1063/1.118183

[6] F. Hamdani, M. Yeadon, D. J. Smith, H. Tang, W. Kim, A. Salvador, A. Botchkarev, J.M. Gibson, A.Y. Polyakov, M. Skowronski, H. Morkoc, J. Appl. Phys. 83, 983 (1998).

DOI: 10.1063/1.366786

[7] M. Bender, E. Fotunato, P. Nunes, I. Ferreira, A. Marques, R. Martins, N. Katsarakis, V. Cimalla, G. Kiriakidis, Jpn. Journal of Applied Physics Letters 42, L435 (2003).

DOI: 10.1143/jjap.42.l435

[8] M. Joseph, H. Tabata, T. Kawai, Jpn. J. Appl. Phys., Part 2: Lett 38, L1205 (1999).

[9] C.C. Lin, S.Y. Chen, Appl. Phys. Lett. 84, 5040 (2004).

[10] D.C. Look, B. Claflin, Phys. Stat. Sol. (b) 241, 3, 624 (2004).

[11] R. Martins, E. Fortunato, P. Nunes, I. Ferreira, A. Marques, M. Bender, N. Katsarakis, V. Cimalla, G. Kiriakidis, J. Appl. Phys. 96, 1398 (2004).

[12] E. Fortunato, P. Barquinha, A. Pimentel, A. Gonçalves, A. Marques, L. Pereira, R. Martins, Appl. Phys. Lett. 85, 2451 (2004).

[13] E. Fortunato, P. Barquinha, A. Pimentel, A. Gonçalves, A. Marques, L. Pereira, R. Martins, Advanced Materials 17, 590 (2005).

[14] J. Xu, Y. Shun, Q. Pan, and J. Qin, Sens. & Actuators B 66, 161 (2000).

[15] M. Aslam, V. A. Chaudhary, I. S. Mulla, S. R. Sainkar, A. B. Mandale, A. A. Belhekar, and K. Vijayamorhanan, Sens. & Actuators B 75, 162 (1999).

[16] M. Kudo, T. Kosaka, Y. Takahashi, H. Kokusen, N. Sotani, and S. Hasegawa, Sens. & Actuators B 69, 10 (2000).

[17] M. Bender, N. Katsarakis, E. Gagaoudakis, E. Hourdakis, E. Douloufakis, V. Cimalla, and G. Kiriakidis, J. Appl. Phys. 90, 5382 (2001).

DOI: 10.1063/1.1410895

[18] S. Masuda, K Kitamura, Y. Okumura, S. Miyatake, H. Tabata and T. Kawai, J. Appl. Phys. 93, 1624 (2003).

[19] R.L. Hoffman, B.J. Norris, and J.F. Wager, Appl. Phys. Lett. 82, 733 (2003).

[20] P.F. Carcia, R.S. McLean, M.H. Reilly, and G. Nunes. Appl. Phys. Lett. 82, 1117 (2003).

[21] J. Nishii, F.M. Hossain, S. Takagi, T. Aita, K. Saikusa, Y. Ohmaki, I. Ohkubo, A. Ohtomo, T. Fukumura, F. Matsukura, Y. Ohno, H. Koinuma, H. Ohno and M. Kawasaki, Jpn. J. Appl. Phys. 42, L347 (2003).

DOI: 10.1143/jjap.42.l347

[22] H.S. Bae, J.H. Yoon, J.H. Kim and S. Im, Appl. Phys. Lett. 83, 5313 (2003).

[23] B.J. Norris, J. Anderson, J.F. Wager, and D.A. Keszler, J. Phys. D: Appl. Phys. 36, L105 (2003).

Fetching data from Crossref.
This may take some time to load.