On the Structural Evaluation of Unbiased W-O-N Sputtered Coatings
Tungsten oxynitride films (WOxNy) were deposited with a chemical composition in the range of 0 < x < 1 and 0 < y < 1. For the W-N system, the α-W, β-W, and β-W2N phases were identified according to the amount of nitrogen. In the W-O-N system the structure depended on the amount of oxygen. For an oxygen fraction, fO2 = CO/(CO+CN), smaller than 0.46 the β-W2N phase is evident, whereas above that value the structure became amorphous.
Paula Maria Vilarinho
N. M.G. Parreira et al., "On the Structural Evaluation of Unbiased W-O-N Sputtered Coatings", Materials Science Forum, Vols. 514-516, pp. 825-832, 2006