On the Structural Evaluation of Unbiased W-O-N Sputtered Coatings

Abstract:

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Tungsten oxynitride films (WOxNy) were deposited with a chemical composition in the range of 0 < x < 1 and 0 < y < 1. For the W-N system, the α-W, β-W, and β-W2N phases were identified according to the amount of nitrogen. In the W-O-N system the structure depended on the amount of oxygen. For an oxygen fraction, fO2 = CO/(CO+CN), smaller than 0.46 the β-W2N phase is evident, whereas above that value the structure became amorphous.

Info:

Periodical:

Materials Science Forum (Volumes 514-516)

Edited by:

Paula Maria Vilarinho

Pages:

825-832

DOI:

10.4028/www.scientific.net/MSF.514-516.825

Citation:

N. M.G. Parreira et al., "On the Structural Evaluation of Unbiased W-O-N Sputtered Coatings", Materials Science Forum, Vols. 514-516, pp. 825-832, 2006

Online since:

May 2006

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$35.00

[1] R. Franchy: Surf. Sci. Rep. Vol. 38 (2000), p.195.

[2] C. Louro and A. Cavaleiro: Surf. Coat. Technol. Vol. 116-119 (1999), p.74.

[3] M. Ohring: The Materials Science of Thin Films (Academic Press, San Diego 1992).

[4] H.F. Winters: J. Vac. Sci. Technol. Vol. 3 (1982), p.493.

[5] M. -A. Nicolet, K. Affolter and H. Kattelus: Proc. Symp. Mat. Res. Soc. Vol 47 (1985), p.167.

[6] C.C. Baker and S.I. Shah: J. Vac. Sci. Technol. A Vol 20 (5) (2002), p.1699.

[7] N.M.G. Parreira, N.J.M. Carvalho and A. Cavaleiro: Submitted to Thin Solid Films (2005).

[8] T.B. Massalski: Binary Alloy Phase Diagrams Vol. 3 (ASM International 1990).

[9] N.M.G. Parreira, N.J.M. Carvalho, F. Vaz and A. Cavaleiro: Accepted to publication in Surf. Coat. Technol. (2005).

[10] H.J. Goldschmidt: Interstitial Alloys (Butterworths, London 1967).

[11] G.S. Chen, H.S. Tian, C.K. Lin, G. -S Chen and H.Y. Lee: J. Vac. Sci. Technol. A Vol. 22 (2004), p.281.

[12] J. Musil, H. Poláková, J. Suna and J. Vlcek: Surf. Coat. Technol. Vol. 177-178 (2004), p.289.

[13] Y.G. Shen and Y.W. Mai: Mater. Sci. Eng. B Vol. 76 (2000), p.107.

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