Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition
We have synthesized the film-like and rod-like structures of indium oxide (In2O3) by metalorganic chemical vapor deposition (MOCVD) method. The structural morphology of the deposits changed from the film to the arrays of 1-dimensional (1-D) materials with increasing the deposition temperature. The 1-D materials with the serrated surfaces prepared at 350°C possessed a crystalline cubic structure and had preferentially grown along the  direction.
A.K. Arof and S.A. Hashim Ali
H. W. Kim et al., "Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition ", Materials Science Forum, Vol. 517, pp. 77-80, 2006