Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition


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We have synthesized the film-like and rod-like structures of indium oxide (In2O3) by metalorganic chemical vapor deposition (MOCVD) method. The structural morphology of the deposits changed from the film to the arrays of 1-dimensional (1-D) materials with increasing the deposition temperature. The 1-D materials with the serrated surfaces prepared at 350°C possessed a crystalline cubic structure and had preferentially grown along the [111] direction.



Edited by:

A.K. Arof and S.A. Hashim Ali




H. W. Kim et al., "Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition ", Materials Science Forum, Vol. 517, pp. 77-80, 2006

Online since:

June 2006




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