Annealing Effects on GaN/ZnO/Si Structures Prepared by RF Magnetron Sputtering


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This study shows the effect of thermal annealing on GaN/ZnO/Si structures prepared by rf magnetron sputtering. Thermal annealing tended to induce a different crystalline orientation from the c-axis orientation observed with as-deposited films. The sample annealed at 900 oC under excitation at 325 nm showed two emission bands centered at approximately 380 and 550 nm.



Edited by:

Dragan P. Uskokovic, Slobodan K. Milonjic and Dejan I. Rakovic




H. W. Kim et al., "Annealing Effects on GaN/ZnO/Si Structures Prepared by RF Magnetron Sputtering", Materials Science Forum, Vol. 518, pp. 137-142, 2006

Online since:

July 2006




[1] S. Nakamura, M. Senoh, S.I. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku and Y. Sugimoto: Jpn. J. Appl. Phys. Vol. 35 (1996), p. L74.


[2] S.K. Hong, H.J. Ko, Y. Chen, T. Hanada and T. Yao: J. Cryst. Growth Vol. 214-215 (2000), p.81.

[3] A. Strittmatter, A. Krost, V. Trück, M. Straßburg, D. Bimberg, J. Bläsing, T. Hempel, J. Christen, B. Neubauer, D. Gerthsen, T. Christmann and B.K. Meyer: Mater. Sci. Eng. B Vol. 59 (1999), p.29.


[4] D.C. Park, S. Fujita and S. Fujita: J. Mater. Sci. Lett. Vol. 19 (2000), p.631.

[5] M. Dinescu, M.P. Verardi, C. Boulmer-Leborgne, C. Gerardi, L. Mirenghi and V. Sandu: Appl. Surf. Sci. Vol. 127-129 (1998), p.559.

[6] H.W. Kim and N.H. Kim: Appl. Surf. Sci. Vol. 236 (2004), p.192.

[7] H.W. Kim and N.H. Kim: Mater. Sci. Eng. B Vol. 103 (2003), p.297.

[8] R.P. Wang, H. Muto, Y. Yamada and T. Kusumori: Thin Solid Films Vol. 411 (2002), p.69.

[9] R.P. Wang, H. Muto and T. Kusumori: Opt. Mater. Vol. 23 (2003), p.15.

[10] S.M. Liao, J.H. Wen, W.C. Chou and S.M. Lan: Mater. Sci. Eng. B Vol. 48 (1997), p.205.

[11] S. Cho, J. Ma, Y. Kim, Y. Sun, G.K.L. Wong and J.B. Ketterson: Appl. Phys. Lett. Vol. 75 (1999), p.2761.

[12] D.M. Bagnall, Y.F. Chen, M.Y. Shen, Z. Zhu and T. Goto: J. Cryst. Growth Vol. 184-185 (1998), p.605.

[13] R. Dingle and M. Ilegems: Solid State Commun. Vol. 9 (1971), p.175.

[14] I. Ozerov, M. Arab, V.I. Safarov, W. Marine, S. Giorgio, M. Sentis and L. Nanai: Appl. Surf. Sci. Vol. 226 (2004), p.242. 111.