Carbon (sp3) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model

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Periodical:

Materials Science Forum (Volumes 52-53)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

237-290

DOI:

10.4028/www.scientific.net/MSF.52-53.237

Citation:

Y. Lifshitz et al., "Carbon (sp3) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model", Materials Science Forum, Vols. 52-53, pp. 237-290, 1990

Online since:

January 1991

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$35.00

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