Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge

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Periodical:

Materials Science Forum (Volumes 52-53)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

291-300

DOI:

10.4028/www.scientific.net/MSF.52-53.291

Citation:

S. Berg and B. Gelin, "Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge", Materials Science Forum, Vols. 52-53, pp. 291-300, 1990

Online since:

January 1991

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