Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

41-70

DOI:

10.4028/www.scientific.net/MSF.52-53.41

Citation:

P. Koidl et al., "Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films", Materials Science Forum, Vols. 52-53, pp. 41-70, 1990

Online since:

January 1991

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$35.00

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