Investigation of the Mechanical Properties of 25 nm and 90 nm, Hard Carbon Films Residing on Al

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Periodical:

Materials Science Forum (Volumes 52-53)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

657-670

DOI:

10.4028/www.scientific.net/MSF.52-53.657

Citation:

W.R. LaFontaine et al., "Investigation of the Mechanical Properties of 25 nm and 90 nm, Hard Carbon Films Residing on Al", Materials Science Forum, Vols. 52-53, pp. 657-670, 1990

Online since:

January 1991

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$35.00

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