A two-step deposition-oxidation method was successfully developed to fabricate zinc oxide thin films and nanostructures. Morphological observations clearly showed that a controllable growth of dense/porous oxide films, nanowhiskers, nanowires, and nanobelts could be obtained by controlling the deposition and oxidation conditions. Photoluminescence properties of the ZnO films were also studied. A strong and predominant ultra-violet near-band-edge emission could be observed on most of the samples, while a green or red color emission accompanying with a largely suppressed ultra-violet emission could be realized on the samples with different processing conditions. The results therefore indicated that ZnO films and structures with desirable microstructural and optical properties could be obtained with this deposition-oxidation technique under controllable conditions.