GaN Resistive Gas Sensors for Hydrogen Detection


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We report on the fabrication and testing of GaN resistive gas sensors for hydrogen detection. The Si-doped n-type GaN was grown by organometallic vapor phase epitaxy (OMVPE) on c-plane sapphire substrates. The device structure is simply a pair of metal ohmic contact pads. The sensors are sensitive to H2 gas over a wide range of concentration: the lowest concentration tested being ~0.1% H2 (in Ar), well below the lower combustion limit in air. No saturation of the signal is observed up to 100% H2 flow. In the continuous operation mode with varying H2 concentration, a clear and sharp response was recorded with no memory effects during ramping up and down cycles of H2 concentration. The change in current at a fixed voltage to hydrogen was found to change with sensor geometry. The possible gas sensing mechanisms are still under investigation.



Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow




F. Yun et al., "GaN Resistive Gas Sensors for Hydrogen Detection", Materials Science Forum, Vols. 527-529, pp. 1553-1556, 2006

Online since:

October 2006




[1] A. Lloyd Spetz, A. Baranzahi, P. Tobias, and I. Lundstrom: Phys. Stat. Sol. 162 (1997), p.493.

DOI: 10.1002/1521-396x(199707)162:1<493::aid-pssa493>;2-c

[2] B. P. Luther, S. D. Wolter, and S. E. Mohney: Sens. Actuators B 56 (1999), p.164.

[3] J. Schalwig, G. Muller, L. Gorgens, and G. Dollinger: Appl. Phys. Lett. 80 (2002), p.1222.

[4] J. Kim, F. Ren, B. P. Gila, C. R. Abernathy, and S. J. Pearton: Appl. Phys. Lett. 82 (2003), p.739.

[5] J. Kim, B. P. Gila, C. R. Abernathy, G. Y. Chung, F. Ren, and S. J. Pearton: Solid-State Electron. 47 (2003), p.1487.

[6] O. Weidemann, M. Hermann, G. Steinhoff, H. Wingbrant, A. Lloyd Spetz, M. Stutzmann, and M. Eickhoff: Appl. Phys. Lett. 83 (2003), p.773.

DOI: 10.1063/1.1593794

[7] T. J. Fawcett, J. T. Wolan, R. L. Myers, J. Walker, and S. E. Saddow: Appl. Phys. Lett. 85 (2004), p.416.

[8] See, for example, G. W. Hunter, P. G. Neudeck, G. D. Jefferson, and G. C. Madzar: Fourth Annual Space System Health Mangement Technical Conference, National Aeronautic and Space Administration, NASA Tech. Memo 106141; E. Souteyrand, D. Nicolas, and J. R. Martin: Sens. Actuators B 24 (1995).

[9] T. Takada, K. Suzuki, and M. Nakane: Sens. Actuators B 13 (1993), p.404.

[10] J. E. Northrup and J. Neugebauer: Appl. Phys. Lett. 85 (2004), p.3429.

[11] C. G. Van de Walle and J. Neugebauer: Nature 4232 (2003), p.626.

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