A New Method of Mapping and Counting Micropipes in SiC Wafers
Micropipes are considered to be a major device killer in SiC wafers. Developing a method to count and map micropipes efficiently and accurately has been a challenging task to date. In this work, a new method based on KOH etching and full wafer, high resolution digital imaging is developed to map and count micropipes in both conductive and semi-insulating SiC wafers. This method is also compared with a non-destructive method based on laser light scattering and a good agreement between the two methods is demonstrated.
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
J. W. Wan et al., "A New Method of Mapping and Counting Micropipes in SiC Wafers", Materials Science Forum, Vols. 527-529, pp. 447-450, 2006