Electrical Properties of Undoped 6H- and 4H-SiC Bulk Crystals Grown by Halide Chemical Vapor Deposition


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Undoped 6H- and 4H-SiC crystals were grown by Halide Chemical Vapor Deposition (HCVD). Concentrations of impurities were measured by various methods including secondary-ion-mass spectrometry (SIMS). With increasing C/Si ratio, nitrogen concentration decreased and boron concentration increased as expected for the site-competition effect. Hall-effect measurements on 6H-SiC crystals showed that with the increase of C/Si ratio from 0.06 to 0.7, the Fermi level was shifted from Ec-0.14 eV (nitrogen donors) to Ev+0.6 eV (B-related deep centers). Crystals grown with C/Si > 0.36 showed high resistivities between 1053 and 1010 4cm at room temperature. The high resistivities are attributed to close values of the nitrogen and boron concentrations and compensation by deep defects present in low densities.



Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow




H. J. Chung et al., "Electrical Properties of Undoped 6H- and 4H-SiC Bulk Crystals Grown by Halide Chemical Vapor Deposition", Materials Science Forum, Vols. 527-529, pp. 625-628, 2006

Online since:

October 2006




[1] C. H. Carter, V. F. Tsvetkov, R. C. Glass, D. Henshall, M. Brady, S. G. Muller, O. Kordina, K. Irvine, J. A. Edmond, H. S. Kong, R. Singh, S. T. Allen, and J. W. Palmour: Mat. Sci. Eng. B Vol. 61-62 (1999) p.1.

DOI: https://doi.org/10.1016/s0921-5107(98)00437-1

[2] W. C. Mitchel, A. Saxler, R. Perrin, J. Goldstein, S. R. Smith, A. O. Evwaraye, J. S. Solomon, M. Brady, V. Tsvetkov, and C. H. Carter: Mater. Sci. Forum Vol. 338-342 (2000) p.21.

DOI: https://doi.org/10.4028/www.scientific.net/msf.338-342.21

[3] J. R. Jenny, D. P. Malta, S. G. Muller, A. R. Powell, V. F. Tsvetkov, H. M. Hobgood, R. C. Glass, and C. H. Carter: J. Electron. Mater. Vol. 32 (2003) p.432.

[4] D. S. Karpov, O. V. Bord, S. Y. Karpov, A. I. Zhmakin, M. S. Ramm, and Y. N. Makarov: Mater. Sci. Forum Vol. 353-356 (2000) p.37.

DOI: https://doi.org/10.4028/www.scientific.net/msf.353-356.37

[5] Q. Li, A. Y. Polyakov, M. Skowronski, M. D. Roth, M. A. Fanton, and D. W. Snyder: J. Appl. Phys. Vol. 96 (2004) p.411.

[6] M. Fanton, M. Skowronski, D. W. Snyder, H. J. Chung, S. Nigam, B. Weiland, and S. W. Huh: Mater. Sci. Forum Vol. 457-460 (2004) p.87.

DOI: https://doi.org/10.4028/www.scientific.net/msf.457-460.87

[7] H. J. Chung, A. Y. Polyakov, S. W. Huh, S. Nigam, M. Skowronski, M. A. Fanton, B. E. Weiland, and D. W. Snyder: J. Appl. Phys. Vol. 97 (2005) p.084913.

[8] S. Nigam, H. J. Chung, S. W. Huh, A. Y. Polyakov, M. Skowronski: J. Cryst. Growth, in press.

[9] A. Ellison, B. Magnusson, C. Hemmingson, W. Magnusson, T. Iakmov, L. Storasta, A. Henry, N. Henelius, and E. Janzén: Mat. Res. Soc. Symp. Proc. Vol. 640 (2001) p. H1. 2. 1.

DOI: https://doi.org/10.1557/proc-640-h1.2

[10] L. Wang: Mater. Sci. Forum Vol. 457-460 (2004) p.771.

[11] E. R. Glaser, B. V. Shanabrook, and W. E. Carlos: Appl. Phys. Lett. Vol. 86 (2005) p.052109.

[12] M. Tapiero, N. Benjelloun, J. P. Zielinger, S. Elhamd, and C. Noguet: J. Appl. Phys. Vol. 64 (1988) p.4006.

[13] B. Aradi, A. Gali, P. Deak, E. Rauls, T. Frauenheim, and N. T. Son: Mater. Sci. Forum Vol. 353-356 (2000) p.455.

DOI: https://doi.org/10.4028/www.scientific.net/msf.353-356.455

[14] S. W. Huh, A. Y. Polyakov, H. J. Chung, S. Nigam, M. Skowronski, E. R. Glaser, W. E. Carlos, M. Fanton, and N. B. Smirnov, Mater. Sci. Forum (2006), these Proceedings.

[15] C. G. Hemmingsson, N. T. Son, O. Kordina, J. L. Lindstrom, and E. Janzén: Semicond. Sci. Tech Vol. 14 (1999) p.251. Fig. 5 PICTS spectrum of SI 6H-SiC crystals grown with C/Si ratio of 0. 7.