Temperature Induced Phase Transformation on the 4H-SiC(11-20) Surface


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The atomic structure of the 4H-SiC(11 2 0) surface including possible phase transformations via Si deposition and annealing has been investigated using low energy electron diffraction (LEED), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). The sample is initially prepared by hydrogen etching before loading into the ultra-high vacuum system. The sample is then out-gassed to remove oxygen from the surface. To explore the existence of ordered surface phases, Si is deposited on the sample at 850°C for 15 minutes followed by a series of sequential annealing steps. Throughout this process, the surface is monitored by LEED, AES and XPS. LEED shows that the surface continuously maintains a (1×1) periodicity. Yet, two unique and distinguishable (1×1) phases can be identified. The changes between these phases are clearly demonstrated by the LEED spot intensities. Simultaneously, the Auger and XPS data show a decrease in Si intensity.



Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow




W.Y. Lee et al., "Temperature Induced Phase Transformation on the 4H-SiC(11-20) Surface", Materials Science Forum, Vols. 527-529, pp. 673-676, 2006

Online since:

October 2006




[1] E. Rauls, Z. Hajnal, P. Deák and T. Frauenheim: Phys. Rev. B 64 (2001) 245323. �.

[2] C. Virojanadara and L.I. Johansson: Mat. Sci. Forum Vols. 457-460 (2004) p.1321.

[3] T. Seyller, K.V. Emtsev, R. Graupner and L. Ley: Mat. Sci. Forum Vols. 457-460 (2004) p.1317.

[4] Y. Hoshino, S. Matsumoto, K. Ogawa, H. Namba, and Y. Kido: Phys. Rev. B 68 (2003), 073308.

[5] R. L. Myers, Y. Shishkin, O. Kordina, and S.E. Saddow: J. Cryst. Growth 285 (2005) p.486.

[6] J.B. Pendry: J. Phys. C 13 (1980) 937.

[7] U. Starke: Atomic structure of SiC surfaces, in Silicon Carbide, Recent Major Advances (eds: W.J. Choyke, H. Matsunami and G. Pensl, Springer, 2004), p.281.

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