Paper Title:
SiC Substrate Doping Profiles Using Commercial Optical Scanners
  Abstract

Presented is the use of a commercial optical scanner for the mapping of doping density ( ) D N of SiC substrates and as a local probe for D N in different regions. This method provides a fast and cost effective method for determining D N homogeneity, examining local electrical characteristics, and recognizing defect sites including areas of different polytypes or polycrystallinity. Micro-Raman spectroscopy was used to calibrate the transmission intensity with D N . It is shown that features presented in the calculated D N maps strongly correlate to those observed in Lehighton resistivity maps.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
725-728
DOI
10.4028/www.scientific.net/MSF.527-529.725
Citation
J. D. Caldwell, O. J. Glembocki, D. M. Hansen, G. Chung, K. D. Hobart, F. J. Kub, "SiC Substrate Doping Profiles Using Commercial Optical Scanners", Materials Science Forum, Vols. 527-529, pp. 725-728, 2006
Online since
October 2006
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Konstantin Vassilevski, J. Hedley, Alton B. Horsfall, C. Mark Johnson, Nicolas G. Wright
925
Authors: Tohru Sekino, Takumi Okamoto, Tomoko Kasuga, Takafumi Kusunose, Tadachika Nakayama, Koichi Niihara
Abstract:We have investigated a synthesis of metal (Nb, V, Cr, Mn, Co) -doped titania nanotubes using a solution chemical processing in order to...
251
Authors: Geunsik Lim, Tariq Manzur, Aravinda Kar
Chapter 6: SiC Devices, Circuits and Systems
Abstract:An uncooled SiC-based electro-optic device is developed for gas sensing applications. P-type dopants Ga, Sc, P and Al are incorporated into...
1195
Authors: M. Rajendraprasad Reddy, Mutsumi Sugiyama, K. T. Ramakrishna Reddy
Chapter 13: Thin Films
Abstract:Nickel-doped ZnO thin films with different Ni contents (0 - 15%) were deposited on glass substrate at 350°C by a spray pyrolysis technique....
1423