Columnar Pore Growth in n-Type 6H SiC
A hybrid columnar and dendritic porous structure has been developed in n-type 6H SiC using photoelectrochemical etching with proper control of the applied voltage and current density. The diameter of the formed columnar pores is around 200-500 nm. A possible formation mechanism due to the spatial distribution of holes and the HF concentration gradient in the pores is proposed. A self-supporting film with this morphology is a promising candidate for protein dialysis.
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Y. Ke et al., "Columnar Pore Growth in n-Type 6H SiC", Materials Science Forum, Vols. 527-529, pp. 739-742, 2006