Ohmic Contact for C-face n-Type 4H-SiC with Reduced Graphite Precipitation

Abstract:

Article Preview

The characteristics of Ni, Monel (Ni-Cu alloy, Ni55mol%-Cu45mol%), Monel/Si, Ni/Ti/Ni and Mo electrodes were studied for ohmic contact to C-face N-type 4H-SiC. Low contact resistivity (ρC) was not compatible with reduction of graphite precipitation in the case of Ni, Monel, Ni/Ti/Ni, and Mo electrodes. Monel/Si achieved less graphite precipitation and low ρC, which is enough to apply for actual rectifier, because a Monel/Si electrode forms a silicide without reaction between the deposits and the substrate.

Info:

Periodical:

Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow

Pages:

867-870

Citation:

Y. Maeyama et al., "Ohmic Contact for C-face n-Type 4H-SiC with Reduced Graphite Precipitation", Materials Science Forum, Vols. 527-529, pp. 867-870, 2006

Online since:

October 2006

Export:

Price:

$38.00

[1] J. Crofton, P.G. Mullin, J.R. William and M.J. Bozack: J. Appl. Phys. Vol. 77 (1995), p.1317.

[2] T. Nakamura and M. Satoh: Mater. Sci. Forum Vols. 389-393 (2002), p.889.

[3] H. Okamoto (ed): Desk Handbook Phase Diagrams for Binary Alloys, (ASM International, 2000).

[4] C. Arnodo, S. Tyc, F. Wyczisk and C. Brylinski: Inst. Phys. Conf. Ser. Vol. 142 (1995), p.577.

[5] S. Tanimoto, N. Kiritani, M. Hoshi and H. Okushi: Mater: Sci. Forum Vols. 389-393 (2002), p.879.

[6] H. Berger: Solid-State Sci. Technol. Vol. 119 (1972), p.507.

[7] K. Nishikawa, M. Shimizu, B. Foster and H. Iwakuro: Mater. Sci. Forum Vols. 353-356 (2001), p.611.

[8] F.J.J. van Loo and A.A. Kodentsov: Pure & Appl. Chem. Vol. 70 (1998), p.501.

[9] I. Zverev, H. Kapels, R. Rupp, M. Herfurth: Proc. 23rd PCIM Int. Exhibit. Conf. Nürnberg, 2002 Fig. 4. Relationship between contact resistivity and graphite precipitation. Fig. 3. I-V characteristics of 5μm contact spacing.

[10] -5.

[2] [4] [6] [10] -4.

[2] [4] [6] [10] -3 Contact resistivity [Ωcm2 ] 7654321.

[10] -3.

[2] [4] [6] [10] -2.

[2] [4] [6] [10] -1Voltage drop at 100A/cm.

[2] [V] Mo Monel Monel/Si Ni/Ti/Ni Ni Ni based Amount of graphite large small electrode -40 -20.

[20] [40] Current [mA] -1. 0 -0. 5 0. 0 0. 5 1. 0 Voltage [V] Ni Monel Monel/Si Ni/Ti/Ni Mo Width=2. 5E-4m Distance=5E-6m.