A Study of Inhomogeneous Schottky Diodes on n-Type 4H-SiC


Article Preview

In this study, we performed a statistical analysis of 500 Ni Schottky diodes distributed across a 2-inch, n-type 4H-SiC wafer with an epilayer grown by chemical vapor deposition. A majority of the diodes displayed ideal thermionic emission when under forward bias, whereas some diodes showed ‘double-barrier’ characteristics with a ‘knee’ in the low-voltage log I vs. V plot. X-ray topography (XRT) and polarized light microscopy (PLM) revealed no correlations between screw dislocations and micropipes and the presence of double-barrier diodes. Depth resolved cathodoluminescence (DRCLS) indicated that certain deep-level states are associated with the observed electrical variations.



Materials Science Forum (Volumes 527-529)

Edited by:

Robert P. Devaty, David J. Larkin and Stephen E. Saddow




D.J. Ewing et al., "A Study of Inhomogeneous Schottky Diodes on n-Type 4H-SiC", Materials Science Forum, Vols. 527-529, pp. 911-914, 2006

Online since:

October 2006




[1] F. La Via, F. Roccaforte, S. Di Franco, A. Ruggiero, L. Neri, R. Reitano, L. Calcagno, G. Foti, M. Mauceri, S. Leone, G. Pistone, G. Abbondanza, G. Abbagnale, G.L. Valente, and D. Crippa, Mater. Sci. Forum 483-485, (2005), p.429.

DOI: 10.4028/www.scientific.net/msf.483-485.67

[2] T. Tsuji, S. Izumi, A. Ueda, H. Fujisawa, K. Ueno, H. Tsuchida, I. Kamata, T. Jikimoto, and K. Izumi, Mater. Sci. Forum 389-393, (2002), p.1141.

DOI: 10.4028/www.scientific.net/msf.389-393.1297

[3] D. Defives, O. Noblanc, C. Dua, C. Brylinski, M. Barhula, and F. Meyer, Mat. Sci. Eng., B 61-62 (1999), p.396.

[4] B.J. Skromme, E. Luckowski, K. Moore, M. Bhatnagar, C.E. Weitzel, T. Gehoski, and D. Ganser, J. Electron. Mater. 29, (2000), p.376.

[5] X. Ma, M. Parker, and T.S. Sudarshan, Appl. Phys. Lett, 74 (2002), p.3298.

[6] R.F. Schmitsdorf, T.U. Kampen, and W. Mönch, J. Vac. Sci. Technol. B 15, (1997), p.1221.

[7] A. Kakanakova-Georgieva, R. Yakimova, M.K. Linnarsson, and E. Janzén, J. Appl. Phys., 91, (2002), p.3471.

Fetching data from Crossref.
This may take some time to load.