Micro-flowing technique gained popular applications in microdevices of microelectromechanical systems (MEMS), and the performance of micro-devices is greatly determined by the properties of micro-flow. This paper studied the characteristics of different viscosity fluid flowing over microchannels with different diameters and lengths under low pressure driving, and the influence of scale effects on the flowing characteristics of low viscosity fluids was also examined. The experiments studied the flow rate–pressure characteristics of distilled water flowing over microchannels with diameter of 13 μm, 20 μm, and silicon oil flowing over microchannels with diameters of 50 μm, 100 μm. The results indicate that, when the diameter of micro-channel is more than 20 μm, the flowing characteristics of distilled water and silicon oil agrees well with conventional flow theory, and when the diameter of microchannels is 13μm, the flowing characteristics are related to the length of micro-channel. When the length is relatively shorter, the flowing characteristics are almost in agreement with the conventional flow theory. When the length reaches 100 mm, the flow rate is much higher than the values predicted by theoretical calculation when the length reaches 100 mm. It is obvious that scale effect arises when the length arrives to 100 mm and the velocity slippage results in the great increase of flow rate.