Laser Fabrication of Low Resistivity Electrode on Glass

Abstract:

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A method for low resistivity resistor on transparent substrate with laser induced plasma assisted by ablation and laser annealing was described. The diffusion distribution for metallization was measured with XPS. The surface profile was analysed with SEM. The minimum resistivity we got was 0.1 /Sq. It demonstrates that the electronic thin film obtained has a very good conductivity. The most important factors for forming electrically conducting films on the transparent substrate are laser fluence, beam scanning and pulse repetition rate. This technology will be useful in the fabrication of LCD electrode, glass defused resistor and circuit on glass.

Info:

Periodical:

Materials Science Forum (Volumes 532-533)

Edited by:

Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu

Pages:

345-348

DOI:

10.4028/www.scientific.net/MSF.532-533.345

Citation:

D. J. Wu et al., "Laser Fabrication of Low Resistivity Electrode on Glass", Materials Science Forum, Vols. 532-533, pp. 345-348, 2006

Online since:

December 2006

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Price:

$35.00

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