The purpose of this experimental research are investigation the growth behaviors of the oxide layer at different pre-dressing conditions in ELID pre-dressing, effects of voltage and duty ratio of the power supply, wheel speed on the oxide layer formation characteristics on the metal bond diamond wheel surface. The results indicated that the oxide layer thickness on the wheel surface increase with pre-dressing time. The oxide layer growth rate is faster in beginning period time of pre-dressing process then slow down. Both the thickness and growth rate of oxide layer increase with the increase of duty ratio and applied voltage. It takes longer time for oxide layer growth rate to reach to stable state in lower duty ratio condition than in higher duty ratio condition. There are no effects of wheel speed on oxide layer growth behaviors in the wheel speed range of 1000rpm to 4000 rpm.