Temperature and Humidity Effects on Micro/Nano Handling

Abstract:

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Micro/nano handling is an important enabling technology for future manufacturing. In the micro scale, adhesion is a severe problem for efficient and accurate handling tasks. The cause of the adhesion is largely from the microforces, namely van der Waals, electrostatic and capillary forces. Those forces, however, are functions of ambient environmental conditions. This paper exams two important ambient environment parameters in normal micro/nano handling environment: temperature and humidity, in both theoretical analysis and experimental studies. A short guideline for microhandling with temperature and humidity consideration is suggested based on the studies.

Info:

Periodical:

Materials Science Forum (Volumes 532-533)

Edited by:

Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu

Pages:

681-684

Citation:

Q. Zhou et al., "Temperature and Humidity Effects on Micro/Nano Handling", Materials Science Forum, Vols. 532-533, pp. 681-684, 2006

Online since:

December 2006

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Price:

$38.00

[1] J. Israelachvili: Intermolecular and Surface Forces, 2 ed (Academic Press, London 1992).

[2] X. Tian and B. Bhushan: J. Phys. D: Appl. Phys., Vol. 29 (1996), p.167.

[3] ISPWS Release on Surface Tension of Ordinary Water Substance (Int. Assoc. Properties of Water and Steam, 1994).

[4] M.D. Ruijter, P. Kolsch, M. Voue, J. De Coninck and J.P. Rabe: Colloids and Surfaces, A: Physicochem. and Eng. Aspects, Vol. 144 (1998), p.235.

DOI: https://doi.org/10.1016/s0927-7757(98)00659-1

[5] J. Frenkel: Kinetic Theory of Liquids (Oxford Univ. Press, London and New York 1949).

[6] T. Eastman and D.M. Zhu: Langmuir, (1996), p.2859.

[7] B. Chang, Q. Zhou and H.N. Koivo: Proc. 2nd VDE World Microtechnologies Cong., MICRO. tec 2003, (2003), p.89.

[8] N.S. Tambe and B. Bhushan: Nanotechnology, Vol. 15 (2004), p.1561.

[9] A. Einsten and L. Infeld: Evolution of Physics (Simon and Schuster, New York 1967).

[10] S. Khan: http: /www. dupont. com/thermount/pdf/comparison. pdf, (1999).

[11] Hyperphysics: http: /hyperphysics. phy-astr. gsu. edu/hbase/tables/diel. html, (2006).

[12] J.M.M. Perez and C. Freyre: Sensors and Actuators B, Vol. 42 (1997), p.27.

[13] H.D. Ackler, R.H. French, and Y.M. Chiang: J. Colloid and Interface Sci., Vol. 179 (1996), p.460.

[14] R.H. French: J. American Ceramic Society, Vol. 83 (2000), p.2117.

[15] Piezosystems Inc.: http: /www. piezo. com/tech3faq. html#app13, (2006).

[16] http: /www. physikinstrumente. de/products/prdetail. php?secid=4-38, (2006).

[17] S. Vorndran: EuroPhotonics, Feburary/March Issue, (2003), p.31.

[18] Q. Zhou, A. Aurelian, B. Chang and et al: J. Micromechatronics, Vol. 2 (2004), p.227.

[19] Q. Zhou, C.D. Corral, P.J. Esteban and et al: Proc. 2002 IEEE/RSJ Int. Conf. on Intelli. Robots and Sys., IROS'02, (2002), p.1760.

[20] P. Ronkanen, P. Kallio, Q. Zhou and H.N. Koivo: Proc. 2nd VDE World Microtechnologies Cong., MICRO. tec 2003, (2003), p.323.

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