Metal Plasma Source Ion Implantation Using a Pulsed Cathodic Arc


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Combining nano-designed plasma source ion implantation and deposition (PSII&D) method has been developed with the pulsed cathodic arc plasma to make a processing system suitable for surface modification of materials such as metals, plastics and ceramics. By controlling the arc plasma pulse and the target pulse, the surface modification can be changed from plasma deposition to ion implantation. Various versions of applying high-voltage pulse bias are described and compared with other methods. Microstructural changes of the nanometered gold films with/without a high voltage bias, concentration profiles of implanted aluminum ions on the surfaces of complex-shaped trench are discussed.



Materials Science Forum (Volumes 534-536)

Edited by:

Duk Yong Yoon, Suk-Joong L. Kang, Kwang Yong Eun and Yong-Seog Kim




S.Y. Chun "Metal Plasma Source Ion Implantation Using a Pulsed Cathodic Arc", Materials Science Forum, Vols. 534-536, pp. 1397-1400, 2007

Online since:

January 2007





[1] J. R. Conrad, J. Appl. Phys. 62, (1987), p.777.

[2] J. R. Conrad, J. L. Radke, R. A. Dodd, F. J. Worzala and N. C. Tran. J. Appl. Phys. 62 (1987), p.4591.

[3] P. N. Silva, J. P. Dias and A. Cavaleiro, Surf. Coat. Technol. 200 (2005), p.168.

[4] C. Blawert, V. Heitmann, W. Dietzel, H. M. Nykyforchyn and M.D. Klapkiv, Surf. Coat. Technol. 200 (2005), p.68.

[5] I. V. Afanasyev-Charkin and M. Nastasi, Surf. Coat. Technol. 200 (2005), p.108.

[6] André Anders, Surf. Coat. Technol. 183 (2004), p.301.

[7] S. Mukherjee, M.F. Maitz, M.T. Pham, E. Richter, F. Prokert and W. Moeller, Surf. Coat. Technol. 196 (2005), p.312.

[8] K. Yukimura, X. Ma and T. Ikehata, Surf. Coat. Technol. 193 (2005), p.17.

[9] S. Y. Chun, Surf. Coat. Technol. 193 (2005), p.129.

[10] S. Y. Chun, A. Chayahara and M. Posselt, Surf. Coat. Technol. 182 (2004), p.171.

[11] M. Ohring: Materials Science of Thin Films (2nd ed, Academic Press, San Diego, 2002).

[12] F. A. Smidt and B. D. Sartwell, Nucl. Instrum. Methods B, 6 (1985), p.70.

[13] K. S. Grabowski, N. E. W. Hartley, C. R. Gossett, and I. Manning, Mater. Res. Soc. Symp. Proc. 27 (1984), p.615.

[14] I. G. Brown, Rev. Sci. Instrum. 65 (1994), p.3061.

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