Preparation of Ru-C Nano-Composite Film by MOCVD and Electrode Properties for Oxygen Gas Sensor


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Ru-C nano-composite films were prepared by metal-organic chemical vapor deposition (MOCVD), and their microstructures and their electrode properties for oxygen gas sensors were investigated. Deposited films contained Ru particles of 5-20 nm in diameter dispersed in amorphous C matrix. The AC conductivities associating to the interface charge transfer between Ru-C composite electrode and YSZ electrolyte were 1000-10000 times higher than that of conventional paste-Pt electrodes. The electro-motive-force (emf) values of the oxygen gas concentration cell constructed from the nano-composite electrodes and YSZ electrolyte showed the Nernstian theoretical values at low temperatures around 500 K. The response time of the concentration cell at 500 K was 900 s.



Materials Science Forum (Volumes 534-536)

Edited by:

Duk Yong Yoon, Suk-Joong L. Kang, Kwang Yong Eun and Yong-Seog Kim




T. Kimura and T. Goto, "Preparation of Ru-C Nano-Composite Film by MOCVD and Electrode Properties for Oxygen Gas Sensor", Materials Science Forum, Vols. 534-536, pp. 1485-1488, 2007

Online since:

January 2007




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