Development of Self-Supporting Polycrystalline Diamond Bridge

Abstract:

Article Preview

Polycrystalline diamond layers are mostly used in various fields of industrial application. Mechanical tension is generated due to the different heat expansion coefficients of the substrate and the layer, which leads to fracturing in some cases. In this work a homogeneous polycrystalline diamond structure has been deposited on Si/SiO2 substrate by microwave assisted CVD method (MW-PECVD). An selective etching technique has been used to remove the silicon below the 2.5 micron thick diamond layer. A self-supporting diamond structure has been created this way. Polycrystalline diamond based heaters and thermometers can be made from doped diamond materials, which can resist corrosive and radiative environment.

Info:

Periodical:

Materials Science Forum (Volumes 537-538)

Edited by:

J. Gyulai and P.J. Szabó

Pages:

145-150

Citation:

H. Csorbai et al., "Development of Self-Supporting Polycrystalline Diamond Bridge", Materials Science Forum, Vols. 537-538, pp. 145-150, 2007

Online since:

February 2007

Export:

Price:

$38.00

[1994] .

[9] S.M. Leeds, P.W. May, E. Bartlett, M.N.R. Ashfold, and K.N. Rosser: Molecular Beam Mass Spectrometry studies of the gas phase chemistry occurring during Microwave Plasma assisted Chemical Vapour Deposition of Diamond, DIAM. RELAT. MATER, 8 pp.1377-82.

DOI: https://doi.org/10.1016/s0925-9635(99)00014-x

[10] M.A. Elliott, P.W. May, J. Petherbridge, S.M. Leeds and M.N.R. Ashfold: Optical Emission Spectroscopic Studies of Microwave Enhanced Diamond CVD using CH4/CO2 Plasmas, DIAM. RELAT. MATER, 9 311-316 [2000].

DOI: https://doi.org/10.1016/s0925-9635(99)00196-x

Fetching data from Crossref.
This may take some time to load.