Microstructure and Gas Sensing Property of Porous SnO2 Sputtered Films


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It is often said that the sensitivity of a gas sensor made of an oxide semiconductor film is enhanced by making the film porous. However, the porosity of sensor films has not been sufficiently examined. In this study, SnO2 films were deposited using DC magnetron sputtering under various substrate temperatures and discharge gas pressures. In addition to the structural analysis by means of X-ray diffraction and scanning electron microscopy, the density and the BET surface area were measured to clarify the film porosity. The sensitivity to H2 gas of undoped and Pd-doped SnO2 films upon exposure to 1000 ppm H2 was measured at 300 . SnO2 films generally showed a columnar structure. The film deposited at a low temperature and a high pressure showed a low density and a large effective surface area. The H2 sensitivity increased as the density decreased, that is, as the effective surface area increased.



Materials Science Forum (Volumes 539-543)

Main Theme:

Edited by:

T. Chandra, K. Tsuzaki, M. Militzer , C. Ravindran




T. Yamazaki et al., "Microstructure and Gas Sensing Property of Porous SnO2 Sputtered Films", Materials Science Forum, Vols. 539-543, pp. 3508-3513, 2007

Online since:

March 2007




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DOI: https://doi.org/10.1016/s0040-6090(03)00506-6

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