Hydrogen Sensing Characteristics of High Electron Mobility Transistor with a Catalytic Pd Metal
In this work, the comprehensive study of an interesting Pd/AlGaAs pseudomorphic high electron mobility transistor (pHEMT) based hydrogen sensor is implemented. The theoretical analysis and simulation are made by using a two-dimensional simulator Medici. In addition, a practical device is fabricated successfully. Based on the variations of the catalytic metal work function, the DC characteristics of experimental and simulated results are compared and studied.
T. Chandra, K. Tsuzaki, M. Militzer , C. Ravindran
K. W. Lin "Hydrogen Sensing Characteristics of High Electron Mobility Transistor with a Catalytic Pd Metal", Materials Science Forum, Vols. 539-543, pp. 5025-5030, 2007