Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets
Ti-Ca-P films on commercial pure (cp) titanium plates were uniformly deposited using dual target RF magnetron sputtering apparatus with DC magnetron sputtering system under the conditions of 50 W DC power to a cp titanium target and 200 W RF power to a β-tricalcium phosphate (β-TCP) target for 60 min in 2.2×10-1 Pa Ar. Resulting samples had smooth surface like mirror. Crystal structure of the film was amorphous. The film had the chemical composition of about 3: 1.7: 1: 11 in Ti: Ca: P: O ratio under controlling the β-TCP target RF sputtering power and the titanium target DC sputtering power. The film and the method are expected to be useful for remodeling surfaces of various titanium implants.
Hyungsun Kim, Junichi Hojo and Soo Wohn Lee
A. Watazu et al., "Ti-Ca-P Films Formed by RF Magnetron Sputtering Method Using Dual Targets", Materials Science Forum, Vols. 544-545, pp. 495-498, 2007