Growth Behavior of Carbon Tips Grown by Electron Beam Induced Deposition Method
For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1&m in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18&m. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.
Hyungsun Kim, Junichi Hojo and Soo Wohn Lee
S. H. Park et al., "Growth Behavior of Carbon Tips Grown by Electron Beam Induced Deposition Method", Materials Science Forum, Vols. 544-545, pp. 757-760, 2007