Trends in Commercially Available SiC Substrates

Abstract:

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Device quality SiC wafers are extremely expensive and available from only a limited number of vendors. This has limited the ability of researchers to compare and evaluate quality from various vendors. This paper surveys some properties and characteristics of SiC wafers purchased in the commercial market place and describes the product variability among vendors as a method to highlight the areas where improvements in substrate quality are desirable.

Info:

Periodical:

Materials Science Forum (Volumes 556-557)

Edited by:

N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina and A. Horsfall

Pages:

291-294

DOI:

10.4028/www.scientific.net/MSF.556-557.291

Citation:

J. D. Oliver "Trends in Commercially Available SiC Substrates", Materials Science Forum, Vols. 556-557, pp. 291-294, 2007

Online since:

September 2007

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$35.00

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