Evaluation of Unintentionally Doped Impurities in Silicon Carbide Substrates Using Neutron Activation Analysis


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Impurity atoms in a high-purity semi-insulating 4H-SiC substrate fabricated by sublimation and an n-type 3C-SiC substrate fabricated by Chemical Vapor Deposition (CVD) were evaluated by neutron activation analysis. Cr, Fe, Zn, As, Br, Mo, Sb, Eu, Yb, Hf, Ta, W and Au atoms were detected in the 4H-SiC fabricated by sublimation. In the 3C-SiC fabricated by CVD, Cr, Zn, As, Br, Mo, Sb, La Sm and Hf atoms were found. The concentration of these atoms tends to decrease with increasing atomic number.



Materials Science Forum (Volumes 556-557)

Edited by:

N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina and A. Horsfall




T. Ohshima et al., "Evaluation of Unintentionally Doped Impurities in Silicon Carbide Substrates Using Neutron Activation Analysis", Materials Science Forum, Vols. 556-557, pp. 457-460, 2007

Online since:

September 2007




[1] W. E. Nelson, F. A. Halden, A. Rosengreen: J. Appl. Phys. Vol. 37 (1966) p.333.

[2] D. K. Ferry: Phys. Rev. Vol. B12 (1975) p.2361.

[3] T. Ohshima, A. Uedono, K. Abe, H. Itoh, Y. Aoki, M. Yoshikawa, S. Tanigawa, I. Nashiyama: Appl. Phys A Vol. 67 (1998) p.407.

[4] H. Heissenstein C. Peppermuller, R. Helbig: J. Appl. Phys. Vol. 83 (1998) p.7542.

[5] St.G. Muller, M.F. Brady, W.H. Brixius, R.C. Glass, H. McD. Hobgood, J.R. Jenny, R.T. Leonard, D.P. Malta, A.R. Powell, V.F. Tsvetkov, S.T. Allen, J.W. Palmour, C.H. Carter Jr.: Mater. Sci. Forum Vol. 433-436 (2003) p.39.

DOI: https://doi.org/10.4028/www.scientific.net/msf.433-436.39

[6] J.R. Jenny, D.P. Malta, M.R. Calus, St.G. Muller, A.R. Powell, V.F. Tsvetkov, H. McD. Hobgood, R.C. Glass, C.H. Carter Jr.: Mater. Sci. Forum Vol. 457-460 (2004) p.35.

DOI: https://doi.org/10.4028/www.scientific.net/msf.457-460.35

[7] D. Macdonald, A. Cuevas: J. Appl. Phys. Vol. 97 (2005) p.033523.

[8] C. Yonezawa, H. Matsue, T. Kurosawa, F. Sasajima, R. P. Putra: Proc. of 2nd Internat. k0 Users Workshop, Ljubljana (Slovenia) (1997), p.129.

[9] R. B. Firesoton and V. S. Shirley, Table of Isotopes (8th Edition), Jhon Wiley & Sons, Inc.