Sodium Enhanced Oxidation of Si-Face 4H-SiC: A Method to Remove Near Interface Traps


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We demonstrate how sodium enhanced oxidation of Si face 4H-SiC results in removal of near-interface traps at the SiO2/4H-SiC interface. These detrimental traps have energy levels close to the SiC conduction band edge and are responsible for low electron inversion channel mobilities (1-10 cm2/Vs) in Si face 4H-SiC metal-oxide-semiconductor field effect transistors. The presence of sodium during oxidation increases the oxidation rate and suppresses formation of these nearinterface traps resulting in high inversion channel mobility of 150 cm2/Vs in such transistors. Sodium can be incorporated by using carrier boats made of sintered alumina during oxidation or by deliberate sodium contamination of the oxide during formation of the SiC/SiO2 interface.



Materials Science Forum (Volumes 556-557)

Edited by:

N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina and A. Horsfall




E. Ö. Sveinbjörnsson et al., "Sodium Enhanced Oxidation of Si-Face 4H-SiC: A Method to Remove Near Interface Traps", Materials Science Forum, Vols. 556-557, pp. 487-492, 2007

Online since:

September 2007




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