Trap Assisted Gas Sensing Mechanism in MISiC Capacitors


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We present the variation of trap assisted conduction current through a dielectric stack comprising TiO2 and SiO2 on SiC as a function of both temperature and hydrogen gas concentration. We show that the current can be modeled by the use of a single barrier height across the temperature range of interest (>300oC ambient). Upon exposure to hydrogen gas, this barrier height is reduced from 0.405 to 0.325eV, whilst the density of traps in the bulk of the TiO2 remains unaffected. We conclude that the formation of a charge dipole layer under the palladium contact is responsible for this change in barrier height, as has been observed in Schottky diode sensor structures. Further, sensing the gas concentration by monitoring of the trap assisted conduction current appears not to be influenced by the existence of interfacial traps, offering the chance to fabricate low drift sensors for deployment in extreme environments.



Materials Science Forum (Volumes 556-557)

Edited by:

N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina and A. Horsfall




A. B. Horsfall et al., "Trap Assisted Gas Sensing Mechanism in MISiC Capacitors", Materials Science Forum, Vols. 556-557, pp. 621-626, 2007

Online since:

September 2007




[1] H. Wingbrant, et al: Sens Actuators B Vol. 93 (2003), p.295.

[2] S. Nakagomi, et al: Chemical Sensors 17 Supplement B 50 (2001), p. 2A09.

[3] A. Lloyd Spetz, et al: Physica Status Solidi (a) Vol. 162 (1997), p.493.

[4] J. Schalwig, et al: IEEE Sensors Journal Vol. 2 (2002), p.394.

[5] C.J. Anthony, et al: Materials Science and Engineering B Vol 62 (1999), p.460.

[6] M.H. Weng, et al: Mat. Sci. Semicond Process In Press.

[7] E.H. Nicollian, J.R. Brews: in MOS Physics and Technology, Wiley and Sons.

[8] W.A. Hill, C.C. Coleman: Solid State Electronics Vol. 23 (1980), p.987.

[9] P. Fiorenza, et al: Journal of Applied Physics Vol. 98 (2005), 044312.

[10] A. Baranzahi, et al: Applied Physics Letters Vol. 67 (1995), p.3203.

[11] C. Svensson, I. Lundström: Journal of Applied Physics Vol. 44 (1973), p.4657.

[12] M. Housaa, et al: Journal of Applied Physics Vol. 87 (2000), p.8619.

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