Nickel Metal Induced Lateral Crystallization of Patterned Amorphous Silicon Thin Film

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Metal-induced lateral crystallization (MILC) of patterned amorphous silicon(a-Si) thin film using Ni as a catalyst has been investigated. Ni-MILC grains are based on the growth of needle-like crystals due to the migration of NiSi2 precipitates, which located at the crystalline front, along the <111> directions. In the case where the needle-like crystallites collided at the a-Si pattern edge, not only “turn” or “branch” of the needle-like crystallites toward one of the possible <111> directions but also the growth along the pattern edge were observed. By limiting the growth area, the competitive growth of dendrite crystals that originated in needle-like crystallites was found to appear. This phenomenon resulted in the orientation alignment of MILC crystals in a wide area. Besides, the grain-filtering of MILC crystals was found to be possible by narrowing the pattern width.

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Periodical:

Materials Science Forum (Volumes 561-565)

Main Theme:

Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee

Pages:

1149-1152

DOI:

10.4028/www.scientific.net/MSF.561-565.1149

Citation:

G. Nakagawa and T. Asano, "Nickel Metal Induced Lateral Crystallization of Patterned Amorphous Silicon Thin Film", Materials Science Forum, Vols. 561-565, pp. 1149-1152, 2007

Online since:

October 2007

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$35.00

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