Investigation of Aluminum Content on the Properties of Sol-Gel-Derived Zinc Oxide Thin Films
This paper reports that ZnO:Al films were deposited onto glass substrates by sol-gel process. Al/Zn atomic ratio varied in a wide range from 0 ~ 20%. The structural and optical properties were investigated by X-ray diffraction (XRD) and optical transmittance, respectively. X-ray photoemission spectroscopy (XPS) was used to investigate the elemental compositions. XRD results showed that ZnO films remained c-axis-orientated when Al/Zn atomic ratio was below 20% and the grain size decreased with increasing Al content. The optical transmittance showed that the optical bandgap of ZnO films blueshifted with increasing Al/Zn atomic ratio from 0-20%. XPS measurements showed that the binding energy of O1s increased with increasing Al content.
Young Won Chang, Nack J. Kim and Chong Soo Lee
S. W. Xue and X. T. Zu, "Investigation of Aluminum Content on the Properties of Sol-Gel-Derived Zinc Oxide Thin Films", Materials Science Forum, Vols. 561-565, pp. 1173-1176, 2007