Investigation of Aluminum Content on the Properties of Sol-Gel-Derived Zinc Oxide Thin Films


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This paper reports that ZnO:Al films were deposited onto glass substrates by sol-gel process. Al/Zn atomic ratio varied in a wide range from 0 ~ 20%. The structural and optical properties were investigated by X-ray diffraction (XRD) and optical transmittance, respectively. X-ray photoemission spectroscopy (XPS) was used to investigate the elemental compositions. XRD results showed that ZnO films remained c-axis-orientated when Al/Zn atomic ratio was below 20% and the grain size decreased with increasing Al content. The optical transmittance showed that the optical bandgap of ZnO films blueshifted with increasing Al/Zn atomic ratio from 0-20%. XPS measurements showed that the binding energy of O1s increased with increasing Al content.



Materials Science Forum (Volumes 561-565)

Main Theme:

Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee




S. W. Xue and X. T. Zu, "Investigation of Aluminum Content on the Properties of Sol-Gel-Derived Zinc Oxide Thin Films", Materials Science Forum, Vols. 561-565, pp. 1173-1176, 2007

Online since:

October 2007




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