Calcium phosphate films were prepared by MOCVD using Ca(dpm)2 and (C6H5O)3PO precursors. The phases, composition and morphology of films changed depending on the molar ratio of Ca to P precursors (RCa/P), total pressure (Ptot) and substrate temperature (Tsub). α-tricalcimu phosphate (α-TCP, α-Ca3(PO4)2) films in a single phase were obtained at Tsub = 1073 K, 0.1 < RCa/P < 0.4 and Tsub = 973 K, RCa/P < 0.4. Hydroxyapatite (HAp, Ca10(PO4)6(OH)2) films in a single phase were obtained at Tsub = 1073 K, 0.8 < RCa/P < 1.0 and Tsub = 973 K, 0.5 < RCa/P < 0.6. Ca-P-O films had a dense and smooth surface. HAp formed within 1 day on the α-TCP film and wholly covered the specimens within 2 weeks in a Hanks’ solution. The surface of CVD-HAp film was covered by precipitated HAp within 6 hours.