Coating with Supersonic Free-Jet PVD
Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of “gas evaporation” and “vacuum deposition”. In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJPVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.
Young Won Chang, Nack J. Kim and Chong Soo Lee
N. Niwa et al., "Coating with Supersonic Free-Jet PVD", Materials Science Forum, Vols. 561-565, pp. 981-984, 2007