Coating with Supersonic Free-Jet PVD

Abstract:

Article Preview

Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of “gas evaporation” and “vacuum deposition”. In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJPVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.

Info:

Periodical:

Materials Science Forum (Volumes 561-565)

Main Theme:

Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee

Pages:

981-984

Citation:

N. Niwa et al., "Coating with Supersonic Free-Jet PVD", Materials Science Forum, Vols. 561-565, pp. 981-984, 2007

Online since:

October 2007

Export:

Price:

$38.00

[1] Y. M. Chem, G. P. Yu and J. H. Huang: Surf. Coat. Technol. 141(2001) 156-163.

[2] S. Xiao, C. P. Lungu and O. Takai: Thin Solid Films 334(1998) 173-177.

[3] S. Wouters, S. Kadlec, C. Quaeyhaegens and L. M. Stals: Surf. Coat. Technol. 97(1997) 114-121.

[4] Y. Inokuti, K. Suzuki and Y. Kobayashi: Mater. Trans., JIM 36(1995) 1081-1087.

[5] H. Sato, M. Sato, M. Tagami, K. Funato, M. Sasaki, S. Taguchi, S. Mizuno and M. Kobayashi: Vacuum 59(2000) 437-444.

DOI: https://doi.org/10.1016/s0042-207x(00)00299-2

[6] C. P. Lungu, M. Futsuhara, O. Takai, M. Braic and G. Musa: Vacuum 51(1998) 635-640.

DOI: https://doi.org/10.1016/s0042-207x(98)00264-4

[7] C. H. Park, Y. M. Sung and W. G. Lee: Thin Solid Films 312(1998) 188-195.

[8] A. Larsson and S. Ruppi: Thin Solid Films 402(2002) 203-210.

[9] J. Y. Yun and S. W. Rhee: Thin Solid Films 320(1998) 163-165.

[10] X. Zeng, S. Zhang and J. Hsieh: Surf. Coat. Technol. 102(1998) 108-112.

[11] B. A. Movchan: Surf. Coat. Technol. 149(2002) 252-262.

[12] I. Dahan, U. Admon, N. Frage, J. Sariel, M. P. Dariel and J. J. Moore: Surf. Coat. Technol. 137(2001) 111-115.

[13] A. Raveh, M. Weiss, M. Pinkas, D. Z. Rosen and G. Kimmel: Surf. Coat. Technol. 114(1999) 269-277.

[14] A.A. Voevodin, M. A. Capano, S. J. P. Laube, M. S. Donley and J. S. Zabinski: Thin Solid Films 298(1997) 107-115.

[15] K. Kokini, J. Dejonge, S. Rangeraj and B. Beardsley: Surf. Coat. Technol. 154(2002) 223-231.

[16] A. Yumoto, F. Hiroki, I. Shiota and N. Niwa: J. Japan Inst. Metals 65(2001) 635-643, in Japanese.

[17] A. Yumoto, F. Hiroki, I. Shiota and N. Niwa: Proc. of the Second International Conference on Light Materials for Transportation Systems (LiMAT-2001), pp.991-996.

[18] A. Yumoto, F. Hiroki, I. Shiota and N. Niwa: MASS AND CHARGE TRANSPORT IN INORGANIC MATERIALS Fundamentals to Devices, (P. Vincenzini and V. Buscaglia, Eds., TECHNA, 2000) pp.991-998.

[19] A. Yumoto, F. Hiroki, I. Shiota and N. Niwa: Netsu Shori 42(2002) 83-90, in Japanese.

[20] A. Yumoto, F. Hiroki, I. Shiota and N. Niwa: Surf. Coat. Technol., 169-170(2003) 499-503.

[21] Yumoto, T. Yamamoto, F. Hiroki, I. Shiota and N. Niwa: Mater. Trans. 45(2004), pp.2740-2743.

[22] A. Yumoto, T. Yamamoto, F. Hiroki, I. Shiota and N. Niwa: Materials Science Forum, vol. 492-493(2005), pp.341-346.

[23] A. Yumoto, T. Yamamoto, F. Hiroki, I. Shiota and N. Niwa: Mater. Trans. 45(2004), pp.2740-2743.

[24] A. Yumoto, T. Yamamoto, F. Hiroki, I. Shiota and N. Niwa: Trans. of the Mater. Res. Soc. Jpn., 29(2004), pp.1889-1892.

[25] A. Yumoto, T. Yamamoto, F. Hiroki, I. Shiota and N. Niwa: Mater. Trans. 45(2004), pp.1620-1623.