Coating with Supersonic Free-Jet PVD


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Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of “gas evaporation” and “vacuum deposition”. In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJPVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.



Materials Science Forum (Volumes 561-565)

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Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee






N. Niwa et al., "Coating with Supersonic Free-Jet PVD", Materials Science Forum, Vols. 561-565, pp. 981-984, 2007

Online since:

October 2007




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