Conduction Heating in RTP Fast, and Pattern-Independent

Abstract:

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Various types of conduction-based RTP systems are discussed. It is shown that simple hot plate systems suffer from severe bow of the wafer, when placed directly on the susceptor. This results in non-uniform heating. A solution is to place the wafer on pins; however, this considerably reduces the heat-up rate. An effective way to heat wafers through conduction fast and wellcontrolled is by placing it in a so-called gas bearing, an arrangement in which the wafer floats in between two hot blocks, at a well-controlled, small distance from both blocks. The heat-up rate in this so-called Levitor system is very high (~900°C/s) and uniform. It is demonstrated that this conduction-based system does not suffer from non-uniformities caused by variations in emissivity and/or pattern density across-wafer or within-die. In a direct comparison on pattern-dependent heating effects, substrates with trenches with varying dimensions are spike-annealed in a state-ofthe- art lamp system and in the Levitor. It was shown that temperature non-uniformities in the lampbased and the conduction-based systems are > 40°C and < 1°C, respectively. The conclusion is that the Levitor provides emissivity and pattern-independent heating.

Info:

Periodical:

Materials Science Forum (Volumes 573-574)

Edited by:

W. Lerch and J. Niess

Pages:

375-386

DOI:

10.4028/www.scientific.net/MSF.573-574.375

Citation:

E. Granneman "Conduction Heating in RTP Fast, and Pattern-Independent", Materials Science Forum, Vols. 573-574, pp. 375-386, 2008

Online since:

March 2008

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$35.00

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