Rapid Thermal Processing and beyond: Applications in Semiconductor Processing
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Abstract: The role of single wafer Rapid Thermal Processing (RTP) in semiconductor manufacturing has been steadily expanding over the last 2 decades....
Abstract: Rapid Thermal Processing (RTP) has been a key technology for semiconductor manufacturing. The ability to rapidly change wafer-processing...
Abstract: The study of fast diffusion processes in materials requires short isothermal annealing treatments combined with an accurate temperature...
Abstract: The use of Rapid Thermal Processing to install lattice vacancy profiles into silicon wafers for the purpose of forming a template for the...
Abstract: Significant performance enhancements are offered by silicon on insulator (SOI) or strained silicon, SOI being adopted for advanced devices...
Abstract: An overview of various cleaning procedures for silicon surfaces is presented. Because in-situ cleaning becomes more and more important for...