Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

Volumes 573-574

doi: 10.4028/www.scientific.net/MSF.573-574

Paper Title Page

Authors: Jim Nakos, Joe Shepard

Abstract: The role of single wafer Rapid Thermal Processing (RTP) in semiconductor manufacturing has been steadily expanding over the last 2 decades....

Authors: Bruce Peuse

Abstract: Rapid Thermal Processing (RTP) has been a key technology for semiconductor manufacturing. The ability to rapidly change wafer-processing...

Authors: Nicolaas Stolwijk, Ludmila Lerner, Axel Giese, Wilfried Lerch

Abstract: The study of fast diffusion processes in materials requires short isothermal annealing treatments combined with an accurate temperature...

Authors: Robert J. Falster, Vladimir V. Voronkov

Abstract: The use of Rapid Thermal Processing to install lattice vacancy profiles into silicon wafers for the purpose of forming a template for the...

Authors: Christophe Maleville, Eric Neyret, Daniel Delprat, Ludovic Ecarnot

Abstract: Significant performance enhancements are offered by silicon on insulator (SOI) or strained silicon, SOI being adopted for advanced devices...

Authors: Oliver Senftleben, Hermann Baumgärtner, Ignaz Eisele

Abstract: An overview of various cleaning procedures for silicon surfaces is presented. Because in-situ cleaning becomes more and more important for...


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