There are many factors, such as the laser and geometrical parameters, which influence greatly on the laser bending process. So it is of great importance to determine these variables properly. Considering the relationship of material properties and temperature, a 3-D thermal-mechanical finite element analysis model for laser micro-bending of stainless steel foil is developed based on the software MSC.Marc, and the laser micro-bending process of 0.1mm thick stainless steel foil is implemented. The finite element method simulation process is integrated with the optimization software package iSIGHT through secondary development. The objective function is to realize the maximum bending angle after single laser scan, and laser power, beam diameter and scanning velocity are regarded as the design variables. The forming process is optimized by using genetic algorithm. The optimal result shows the bending angle can be got to the maximum 1.0332°when the laser power, beam diameter and scanning velocity are 32W, 0.17mm and 132mm/s respectively. The experiment results are in good agreement with optimal results.