Research of a Novel MEMS Vector Hydrophone Based on a New Package Process


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A new method for the MEMS die package process was reported. Using the method of bionic package, a novel MEMS vector hydrophone was fabricated from a typical mass-beam accelerometer structure. According to the auditory principle of fish’s lateral line and its nature’s fundamental acoustic sensors-stereocilia, a rigidity cylinder was fixed on the center of the mass as a stereocilia, and the sensitivity structure of the hydrophone was obtained. By means of a specific package process, the sensor was fabricated properly for the underwater sound detection application. From the test results of the sensor, we can see that, this vector hydrophone has a receiving sensitivity of -165dB (0dB=1V/µPa, the amplification factor of the preamplifier is 100.) and a good directional pattern in form of “8”-shape. The hydrophone can work well under the maximum pressure of 2MPa.



Materials Science Forum (Volumes 610-613)

Main Theme:

Edited by:

Zhong Wei Gu, Yafang Han, Fu Sheng Pan, Xitao Wang, Duan Weng and Shaoxiong Zhou






K. R. Zhang et al., "Research of a Novel MEMS Vector Hydrophone Based on a New Package Process", Materials Science Forum, Vols. 610-613, pp. 567-572, 2009

Online since:

January 2009




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