Research of a Novel MEMS Vector Hydrophone Based on a New Package Process
A new method for the MEMS die package process was reported. Using the method of bionic package, a novel MEMS vector hydrophone was fabricated from a typical mass-beam accelerometer structure. According to the auditory principle of fish’s lateral line and its nature’s fundamental acoustic sensors-stereocilia, a rigidity cylinder was fixed on the center of the mass as a stereocilia, and the sensitivity structure of the hydrophone was obtained. By means of a specific package process, the sensor was fabricated properly for the underwater sound detection application. From the test results of the sensor, we can see that, this vector hydrophone has a receiving sensitivity of -165dB (0dB=1V/µPa, the amplification factor of the preamplifier is 100.) and a good directional pattern in form of “8”-shape. The hydrophone can work well under the maximum pressure of 2MPa.
Zhong Wei Gu, Yafang Han, Fu Sheng Pan, Xitao Wang, Duan Weng and Shaoxiong Zhou
K. R. Zhang et al., "Research of a Novel MEMS Vector Hydrophone Based on a New Package Process", Materials Science Forum, Vols. 610-613, pp. 567-572, 2009