Electron beam cold hearth melting process is an efficient method to produce the premium quality titanium alloys, especially to eliminate inclusions. A simulation work was carried out to study the process, concerning the flow field and particle trajectory at three different melt rates. The simulation results show that, when there is an overheat zone near the outlet zone, the molten metal flows to the sidewall of the cold hearth, and from the outlet zone to the inlet zone at the top surface which avoids the inclusion particle flows out the cold hearth. At the bottom of the liquid pool, the fluid flows to the outlet directly along the center plan, which forms a short circuit, decreases the residence time of the inclusion particles; there is a critical density range of inclusion particles, which have more probability to flow out of the cold hearth. The inclusion particles, whose density lower than it, will flow to the sidewall. The inclusion particles, whose density higher than it, will sink into the bottom mushy zone. Both cases let the inclusion have higher probability to eliminate the inclusions.