Fully-Integrated 6H-SiC JFET Amplifiers for High-Temperature Sensing
Fully monolithic, transimpedance and differential voltage amplifiers are reported in this paper based on 6H-SiC, n-channel, depletion-mode JFETs. The single-stage transimpedance amplifier has a low-frequency gain of ~222 kΩ at room temperature, with ~2% gain matching for copies on a 6-mm x 6-mm die. The transimpedance gain is set by an integrated resistor and is ~1.1 MΩ at 450oC. The single-stage, differential voltage amplifier has a typical gain-bandwidth of ~2.8 MHz at 600oC and a typical open-loop voltage gain of ~35.8 dB at 25oC, with less than 1-dB gain variation from 25-600oC.
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
A. Patil et al., "Fully-Integrated 6H-SiC JFET Amplifiers for High-Temperature Sensing", Materials Science Forum, Vols. 645-648, pp. 1107-1110, 2010