Barrier Inhomogeneities of Mo Schottky Barrier Diodes on 4H-SiC

Abstract:

Article Preview

In this work we present the results of electrical characterization of 4H-SiC power Schottky diodes with a Mo metal barrier for high power applications. A comparison between different Schottky Barrier Height (SBH) evaluation methods (capacitance-voltage and current-voltage measurements), together with the comparison with other authors’ works, indicates that thermionic current theory is the dominant transport mechanism across the barrier from room temperature (RT) to 450K, while at T < 300K some anomalies in J-V curves appear and SBH and ideality factor significantly change their values. These deviations from ideality are attributed to Schottky barrier inhomogeneities. In particular, a model based on two SBHs seems appropriate to properly describe the electrical behavior of our devices.

Info:

Periodical:

Materials Science Forum (Volumes 645-648)

Edited by:

Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller

Pages:

227-230

DOI:

10.4028/www.scientific.net/MSF.645-648.227

Citation:

M. Naretto et al., "Barrier Inhomogeneities of Mo Schottky Barrier Diodes on 4H-SiC", Materials Science Forum, Vols. 645-648, pp. 227-230, 2010

Online since:

April 2010

Export:

Price:

$35.00

[1] W. J. Choyke, H. Matsunami and G. Pensl, Silicon Carbide: Recent Major Advances, eds. Springer-Verlag, Berlin, Heidelberg, New York (2004).

[2] J.P. Sullivan et al., J. Appl. Physics, Vol. 70 no. 12 (1991), pp.7403-7424.

[3] R.T. Tung, Mat. Sci. Eng., Vol. R35 (2001), pp.1-138.

[4] D. Defives et al., IEEE Trans. El. Dev., Vol. 46 no. 3 (1999), pp.449-455.

[5] J.H. Werner, H.H. Guttler, J. Appl. Phys. Vol. 69 (1991), p.1522.

[6] S. Ferrero et al., Microelectronic Engineering Vol. 83 (2006), pp.86-88.

[7] D. Perrone et al., Mat. Sci. Forum Vols. 615-617 (2009), pp.647-650.

[8] A. F. Hamida et al, Semicond. Sci. Technol. Vol. 23 (2008), pp.1-6 Fig. 2. Richardson plot of the Mo/4H-SiC SBD.

In order to see related information, you need to Login.