Diffusion of Groups -IV and -V Impurities in Silicon at High Donor Concentrations: A Comparison between Experimental and Theoretical Results

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Periodical:

Materials Science Forum (Volumes 65-66)

Edited by:

Gordon Davies

Pages:

293-298

DOI:

10.4028/www.scientific.net/MSF.65-66.293

Citation:

K.K. Larsen and A. N. Larsen, "Diffusion of Groups -IV and -V Impurities in Silicon at High Donor Concentrations: A Comparison between Experimental and Theoretical Results", Materials Science Forum, Vols. 65-66, pp. 293-298, 1991

Online since:

January 1991

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$35.00

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