On the Interplay between Vacancies and Interstitial Clusters in CZ-Grown Silicon

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Periodical:

Materials Science Forum (Volumes 65-66)

Edited by:

Gordon Davies

Pages:

307-312

DOI:

10.4028/www.scientific.net/MSF.65-66.307

Citation:

W. Puff and S. Dannefaer, "On the Interplay between Vacancies and Interstitial Clusters in CZ-Grown Silicon", Materials Science Forum, Vols. 65-66, pp. 307-312, 1991

Online since:

January 1991

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$35.00

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