Study on the Energy Structure of Amorphous Antireflection Er2O3 Films on Si(001) Substrates
Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray photoelectron spectroscopy, x-ray diffraction and atomic force microscopy show the Er2O3 films obtained are stoichiometric, amorphous, and uniform. The electronic structure is studied which shows a large energy gap value of the Er2O3 film, indicating Er2O3 film could be a promising antireflection coating for solar cells.
Yuan Ming Huang
Y. Y. Zhu et al., "Study on the Energy Structure of Amorphous Antireflection Er2O3 Films on Si(001) Substrates", Materials Science Forum, Vols. 663-665, pp. 612-615, 2011