Study on the Energy Structure of Amorphous Antireflection Er2O3 Films on Si(001) Substrates


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Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray photoelectron spectroscopy, x-ray diffraction and atomic force microscopy show the Er2O3 films obtained are stoichiometric, amorphous, and uniform. The electronic structure is studied which shows a large energy gap value of the Er2O3 film, indicating Er2O3 film could be a promising antireflection coating for solar cells.



Materials Science Forum (Volumes 663-665)

Edited by:

Yuan Ming Huang




Y. Y. Zhu et al., "Study on the Energy Structure of Amorphous Antireflection Er2O3 Films on Si(001) Substrates", Materials Science Forum, Vols. 663-665, pp. 612-615, 2011

Online since:

November 2010




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