Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe

Abstract:

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To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated. Au and glass samples were measured by the probes working at a non-contact AFM mode. The M-AFM probe with the nano-slit having the width of 75 nm, by which the difference of the measured voltage between Au and glass samples is 55.1 mV, shows the highest sensitivity for detecting electrical properties of materials. As the result illustrated, the M-AFM probe with smaller width nano-slit on the tip can be considered to be an ideal nano structure.

Info:

Periodical:

Materials Science Forum (Volumes 675-677)

Edited by:

Yi Tan and Dongying Ju

Pages:

555-558

DOI:

10.4028/www.scientific.net/MSF.675-677.555

Citation:

L. Zhang et al., "Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe", Materials Science Forum, Vols. 675-677, pp. 555-558, 2011

Online since:

February 2011

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Price:

$35.00

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