TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching
We have developed a novel abrasive-free planarization method called catalyst-referred etching (CARE). A CARE-processed 8 deg off-axis 4H-SiC (0001) surface is investigated by cross-sectional transmission electron microscopy (TEM). The surface is composed of alternating wide and narrow terraces with single-bilayer-height steps, which are similar to the structure observed on a CARE-processed on-axis 4H-SiC (0001) surface. These results indicate that the structure appears on CARE-processed surfaces regardless of the off-cut angle.
Edouard V. Monakhov, Tamás Hornos and Bengt. G. Svensson
S. Sadakuni et al., "TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching", Materials Science Forum, Vols. 679-680, pp. 489-492, 2011