TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

Abstract:

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We have developed a novel abrasive-free planarization method called catalyst-referred etching (CARE). A CARE-processed 8 deg off-axis 4H-SiC (0001) surface is investigated by cross-sectional transmission electron microscopy (TEM). The surface is composed of alternating wide and narrow terraces with single-bilayer-height steps, which are similar to the structure observed on a CARE-processed on-axis 4H-SiC (0001) surface. These results indicate that the structure appears on CARE-processed surfaces regardless of the off-cut angle.

Info:

Periodical:

Materials Science Forum (Volumes 679-680)

Edited by:

Edouard V. Monakhov, Tamás Hornos and Bengt. G. Svensson

Pages:

489-492

DOI:

10.4028/www.scientific.net/MSF.679-680.489

Citation:

S. Sadakuni et al., "TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching", Materials Science Forum, Vols. 679-680, pp. 489-492, 2011

Online since:

March 2011

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Price:

$35.00

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